Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab
Photoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemiss...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2022-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/17/epjconf_jnspe2022_01011.pdf |