Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab
Photoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemiss...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2022-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/17/epjconf_jnspe2022_01011.pdf |
| _version_ | 1828119154347999232 |
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| author | Conard Thierry |
| author_facet | Conard Thierry |
| author_sort | Conard Thierry |
| collection | DOAJ |
| description | Photoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemission at synchrotron facilities were available, their use remained confidential due to technical constraints such as measurement time, repeatability of the measurements and/or access to the facilities. In this paper, we show through some examples that the implementation of these features in a user-friendly setup in the laboratory considerably enhances the information retrieved from photoemission experiments. |
| first_indexed | 2024-04-11T13:43:33Z |
| format | Article |
| id | doaj.art-f0d1ea18e00d4251b516dd3dee3a4ca5 |
| institution | Directory Open Access Journal |
| issn | 2100-014X |
| language | English |
| last_indexed | 2024-04-11T13:43:33Z |
| publishDate | 2022-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | EPJ Web of Conferences |
| spelling | doaj.art-f0d1ea18e00d4251b516dd3dee3a4ca52022-12-22T04:21:10ZengEDP SciencesEPJ Web of Conferences2100-014X2022-01-012730101110.1051/epjconf/202227301011epjconf_jnspe2022_01011Photoemission in microelectronic research: When technological developments allow to tackle new questions in the labConard Thierry0Imec/MCACSAPhotoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemission at synchrotron facilities were available, their use remained confidential due to technical constraints such as measurement time, repeatability of the measurements and/or access to the facilities. In this paper, we show through some examples that the implementation of these features in a user-friendly setup in the laboratory considerably enhances the information retrieved from photoemission experiments.https://www.epj-conferences.org/articles/epjconf/pdf/2022/17/epjconf_jnspe2022_01011.pdf |
| spellingShingle | Conard Thierry Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab EPJ Web of Conferences |
| title | Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab |
| title_full | Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab |
| title_fullStr | Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab |
| title_full_unstemmed | Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab |
| title_short | Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab |
| title_sort | photoemission in microelectronic research when technological developments allow to tackle new questions in the lab |
| url | https://www.epj-conferences.org/articles/epjconf/pdf/2022/17/epjconf_jnspe2022_01011.pdf |
| work_keys_str_mv | AT conardthierry photoemissioninmicroelectronicresearchwhentechnologicaldevelopmentsallowtotacklenewquestionsinthelab |