The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy
A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/10/4575 |