INVESTIGATION OF INFLUENCE OF SCANNING STEP ON IR-TRANMISSION SPECTRA OF NITRIDE ALUMINUM FILMS
The influence of scanning step on IR-tranmission spectra of nitride aluminum films had been study. The optimal conditions of scanning, when the ratio «signal-noise» has minimum, had been determined.
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Tver State University
2015-11-01
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| Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| Subjects: | |
| Online Access: | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%97%D1%83%D1%80%D1%85%D0%B0%D0%B5%D0%B2%D0%B0%20%D0%9E%D0%A1.pdf |