Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based...

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Bibliographic Details
Main Authors: Qianbo Lu, Jian Bai, Kaiwei Wang, Peiwen Chen, Weidong Fang, Chen Wang
Format: Article
Language:English
Published: MDPI AG 2018-06-01
Series:Sensors
Subjects:
subwavelength grating pair
rotated serpentine
optomechanical
genetic algorithm
optimization
MOEMS
Online Access:http://www.mdpi.com/1424-8220/18/7/2036

Internet

http://www.mdpi.com/1424-8220/18/7/2036

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