“Playing around†with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs
Microfabricated semiconductor devices are becoming increasingly relevant, alsofor the detection of biological and chemical quantities. Especially, the “marriage†ofbiomolecules and silicon technology often yields successful new sensor concepts. Thefabrication techniques of such silicon-base...
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| Format: | Article |
| Language: | English |
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MDPI AG
2005-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/5/3/126/ |