Shallow etched low-loss thin film lithium niobate waveguides with bound states in the continuum
Thin film lithium niobate (TFLN) features a small photonic device footprint and excellent optical properties. Despite the recent progress on plasma-etched TFLN waveguides, scattering loss induced by the sidewall roughness still limits the performance of the integrated photonic devices. Here, a shall...
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0141436 |