Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the mi...

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Bibliographic Details
Main Authors: Barbara Simoni, Stefano Mariani, Roberto Martini, Alberto Corigliano, Aldo Ghisi
Format: Article
Language:English
Published: MDPI AG 2011-05-01
Series:Sensors
Subjects:
polysilicon MEMS
drops and shocks
brittle cracking
multi-scale simulations
finite element analysis
Online Access:http://www.mdpi.com/1424-8220/11/5/4972/

Internet

http://www.mdpi.com/1424-8220/11/5/4972/

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