Relative positioning control of flexible structure for precise positioning stage
Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedback control systems for precise positioning stages that improve accuracy by using sensor signal feedback. However, the sensor output does not always dir...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2020-02-01
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| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/7/2/7_19-00443/_pdf/-char/en |