Femtosecond Laser Fabrication of Anisotropic Structures in Phosphorus- and Boron-Doped Amorphous Silicon Films

Femtosecond Laser Fabrication of Anisotropic Structures in Phosphorus- and Boron-Doped Amorphous Silicon Films

Femtosecond laser-modified amorphous silicon (a-Si) films with optical and electrical anisotropy have perspective polarization-sensitive applications in optics, photovoltaics, and sensors. We demonstrate the formation of one-dimensional femtosecond laser-induced periodic surface structures (LIPSS) o...

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Bibliographic Details
Main Authors: Dmitrii Shuleiko, Stanislav Zabotnov, Mikhail Martyshov, Dmitrii Amasev, Denis Presnov, Vyacheslav Nesterov, Leonid Golovan, Pavel Kashkarov
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Materials
Subjects:
femtosecond laser pulses
laser-induced periodic surface structures
surface plasmon-polaritons
amorphous silicon
Raman spectroscopy
electrophysical measurements
Online Access:https://www.mdpi.com/1996-1944/15/21/7612

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https://www.mdpi.com/1996-1944/15/21/7612

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