Structure and Technological Parameters’ Effect on MISFET-Based Hydrogen Sensors’ Characteristics

Structure and Technological Parameters’ Effect on MISFET-Based Hydrogen Sensors’ Characteristics

The influence of structure and technological parameters (STPs) on the metrological characteristics of hydrogen sensors based on MISFETs has been investigated. Compact electrophysical and electrical models connecting the drain current, the voltage between the drain and the source and the voltage betw...

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Bibliographic Details
Main Authors: Boris Podlepetsky, Nikolay Samotaev, Maya Etrekova, Artur Litvinov
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Sensors
Subjects:
MISFET
technological parameters
models
hydrogen sensor performances
Online Access:https://www.mdpi.com/1424-8220/23/6/3273

Internet

https://www.mdpi.com/1424-8220/23/6/3273

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