Multi-Foci Division of Nonlinear Energy Absorption on Ultrashort Pulse Laser Singulation of Sapphire Wafers

The multi-foci division of through thickness nonlinear pulse energy absorption on ultrashort pulse laser singulation of single side polished sapphire wafers has been investigated. Firstly, it disclosed the enhancement of energy absorption by the total internal reflection of the laser beam exiting fr...

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Bibliographic Details
Main Authors: Celescia Siew Mun Lye, Zhongke Wang, Yee Cheong Lam
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/11/1328