Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/19/4346 |