Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...

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Bibliographic Details
Main Authors: Yachao Jing, Guofang Fan, Rongwei Wang, Zeping Zhang, Xiaoyu Cai, Jiasi Wei, Xin Chen, Hongyu Li, Yuan Li
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Sensors
Subjects:
optical waveguide cantilever sensor
buffer
sensitivity
Online Access:https://www.mdpi.com/1424-8220/19/19/4346

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