Micro-Vibration Signal Denoising Algorithm of Spectral Morphology Fitting Based on Variational Mode Decomposition
Environmental micro-vibration has a significant impact on the proper functioning of semiconductor production and testing equipment such as the Czochralski growth furnace, polishing machine, photoetching machine, scanning electron microscope, etc. Low-frequency micro vibration has a significant influ...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-12-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/24/12570 |