A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications
An extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated on a silicon wafer. The sensing head is fabricated by MEMS techno...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9759293/ |