A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications
An extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated on a silicon wafer. The sensing head is fabricated by MEMS techno...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9759293/ |
| _version_ | 1811303107600056320 |
|---|---|
| author | Jiang Qian Pinggang Jia Hua Liu Qianyu Ren Jia Liu Li Qin Jijun Xiong |
| author_facet | Jiang Qian Pinggang Jia Hua Liu Qianyu Ren Jia Liu Li Qin Jijun Xiong |
| author_sort | Jiang Qian |
| collection | DOAJ |
| description | An extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated on a silicon wafer. The sensing head is fabricated by MEMS technology including dry etching, anodic bonding and dicing processing. And the optical fiber is intergrated in the sensing head by laser fusing. According to our calculation, the sensor has a resonance frequency of 10.008kHz. Experimental results indicated that the sensitivity of the sensor from 2g to 22g, with the frequency of 200Hz, was 2.48 nm/g at 20° and can work stably at 400°. The nonlinearity of the sensor was evaluated from 20° to 400° and the max nonlinear error was 1.88% at 300°. In addition, the temperature drift and temperature crossed sensitivity of the sensor agreed well with the theoretical analysis. We believe this proposed MEMS vibration sensor has a wide engineering high-temperature application prospect. |
| first_indexed | 2024-04-13T07:40:50Z |
| format | Article |
| id | doaj.art-f2e99f7bca2b4cfc870c762681490459 |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-04-13T07:40:50Z |
| publishDate | 2022-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-f2e99f7bca2b4cfc870c7626814904592022-12-22T02:55:54ZengIEEEIEEE Access2169-35362022-01-0110429084291510.1109/ACCESS.2022.31683509759293A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature ApplicationsJiang Qian0https://orcid.org/0000-0003-2048-9555Pinggang Jia1https://orcid.org/0000-0002-4547-0992Hua Liu2Qianyu Ren3Jia Liu4Li Qin5Jijun Xiong6https://orcid.org/0000-0003-1560-9858State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, ChinaAn extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated on a silicon wafer. The sensing head is fabricated by MEMS technology including dry etching, anodic bonding and dicing processing. And the optical fiber is intergrated in the sensing head by laser fusing. According to our calculation, the sensor has a resonance frequency of 10.008kHz. Experimental results indicated that the sensitivity of the sensor from 2g to 22g, with the frequency of 200Hz, was 2.48 nm/g at 20° and can work stably at 400°. The nonlinearity of the sensor was evaluated from 20° to 400° and the max nonlinear error was 1.88% at 300°. In addition, the temperature drift and temperature crossed sensitivity of the sensor agreed well with the theoretical analysis. We believe this proposed MEMS vibration sensor has a wide engineering high-temperature application prospect.https://ieeexplore.ieee.org/document/9759293/Fiber-opticFabry-Perothigh-temperature applicationsMEMSvibration measurement |
| spellingShingle | Jiang Qian Pinggang Jia Hua Liu Qianyu Ren Jia Liu Li Qin Jijun Xiong A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications IEEE Access Fiber-optic Fabry-Perot high-temperature applications MEMS vibration measurement |
| title | A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications |
| title_full | A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications |
| title_fullStr | A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications |
| title_full_unstemmed | A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications |
| title_short | A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications |
| title_sort | mems fiber optic fabry perot vibration sensor for high temperature applications |
| topic | Fiber-optic Fabry-Perot high-temperature applications MEMS vibration measurement |
| url | https://ieeexplore.ieee.org/document/9759293/ |
| work_keys_str_mv | AT jiangqian amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT pinggangjia amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT hualiu amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT qianyuren amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT jialiu amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT liqin amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT jijunxiong amemsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT jiangqian memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT pinggangjia memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT hualiu memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT qianyuren memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT jialiu memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT liqin memsfiberopticfabryperotvibrationsensorforhightemperatureapplications AT jijunxiong memsfiberopticfabryperotvibrationsensorforhightemperatureapplications |