Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems

In high-power laser systems, the primary cause of contamination of optical components and degradation of spatial cleanliness is laser-induced sputtering of particles. To mitigate this problem, laminar flow is frequently utilized to control the direction and transport of these particles. This study c...

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Bibliographic Details
Main Authors: Ge Peng, Qiang Gao, Zhe Dong, Lingxi Liang, Jiaxuan Chen, Chengyu Zhu, Peng Zhang, Lihua Lu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/3/598