Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems

In high-power laser systems, the primary cause of contamination of optical components and degradation of spatial cleanliness is laser-induced sputtering of particles. To mitigate this problem, laminar flow is frequently utilized to control the direction and transport of these particles. This study c...

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Main Authors: Ge Peng, Qiang Gao, Zhe Dong, Lingxi Liang, Jiaxuan Chen, Chengyu Zhu, Peng Zhang, Lihua Lu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/3/598
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author Ge Peng
Qiang Gao
Zhe Dong
Lingxi Liang
Jiaxuan Chen
Chengyu Zhu
Peng Zhang
Lihua Lu
author_facet Ge Peng
Qiang Gao
Zhe Dong
Lingxi Liang
Jiaxuan Chen
Chengyu Zhu
Peng Zhang
Lihua Lu
author_sort Ge Peng
collection DOAJ
description In high-power laser systems, the primary cause of contamination of optical components and degradation of spatial cleanliness is laser-induced sputtering of particles. To mitigate this problem, laminar flow is frequently utilized to control the direction and transport of these particles. This study characterizes the properties of laser-induced sputtering particles, including their flying trend, diameter range, and velocity distribution at varying time intervals. A time-resolved imaging method was employed to damage the rear surface of fused silica using a 355 nm Nd: YAG pump laser. The efficacy of laminar flow in controlling these particles was then assessed, with a particular focus on the influence of laminar flow direction, laminar flow velocity, particle flight height, and particle diameter. Our results indicate that the optimal laminar flow velocity for preventing particle invasion is highly dependent on the maximum particle attenuation distance (or safety distance), which can vary by up to two orders of magnitude. Furthermore, a laminar flow velocity of 0.5 m/s can effectively prevent particle sedimentation. Future research will aim to optimize laminar flow systems based on these findings to achieve high surface cleanliness in high-power laser systems with minimal energy consumption.
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spelling doaj.art-f366cc51826b4edebb8692867b38d2c72023-11-17T12:43:05ZengMDPI AGMicromachines2072-666X2023-03-0114359810.3390/mi14030598Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser SystemsGe Peng0Qiang Gao1Zhe Dong2Lingxi Liang3Jiaxuan Chen4Chengyu Zhu5Peng Zhang6Lihua Lu7Center for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaCenter for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaCenter for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaNational Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, West Dazhi Street, Harbin 150080, ChinaCenter for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaNational Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, West Dazhi Street, Harbin 150080, ChinaCenter for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaCenter for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, ChinaIn high-power laser systems, the primary cause of contamination of optical components and degradation of spatial cleanliness is laser-induced sputtering of particles. To mitigate this problem, laminar flow is frequently utilized to control the direction and transport of these particles. This study characterizes the properties of laser-induced sputtering particles, including their flying trend, diameter range, and velocity distribution at varying time intervals. A time-resolved imaging method was employed to damage the rear surface of fused silica using a 355 nm Nd: YAG pump laser. The efficacy of laminar flow in controlling these particles was then assessed, with a particular focus on the influence of laminar flow direction, laminar flow velocity, particle flight height, and particle diameter. Our results indicate that the optimal laminar flow velocity for preventing particle invasion is highly dependent on the maximum particle attenuation distance (or safety distance), which can vary by up to two orders of magnitude. Furthermore, a laminar flow velocity of 0.5 m/s can effectively prevent particle sedimentation. Future research will aim to optimize laminar flow systems based on these findings to achieve high surface cleanliness in high-power laser systems with minimal energy consumption.https://www.mdpi.com/2072-666X/14/3/598laser-induced damagefused silicaparticlecleanlinesslaminar flowmotion behavior
spellingShingle Ge Peng
Qiang Gao
Zhe Dong
Lingxi Liang
Jiaxuan Chen
Chengyu Zhu
Peng Zhang
Lihua Lu
Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
Micromachines
laser-induced damage
fused silica
particle
cleanliness
laminar flow
motion behavior
title Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
title_full Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
title_fullStr Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
title_full_unstemmed Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
title_short Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
title_sort surface cleanliness maintenance with laminar flow based on the characteristics of laser induced sputtering particles in high power laser systems
topic laser-induced damage
fused silica
particle
cleanliness
laminar flow
motion behavior
url https://www.mdpi.com/2072-666X/14/3/598
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