Computer Simulation of the Thin Film’s Growth Process during Thermal Vacuum Evaporation
The various thin film growth mechanisms during thermal vacuum evaporation at atomic level are considered under different condition. Which factors and how influence on the quality of obtained thin films was demonstrated. The thin film’s growth process in intermediately (Stranski-Krastanov) mode was s...
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| Format: | Article |
| Language: | Russian |
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Saint Petersburg Electrotechnical University "LETI"
2016-12-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
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| Online Access: | https://re.eltech.ru/jour/article/view/142 |