The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Abstract Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from material...
| Main Authors: | , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-11-01
|
| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00458-z |