Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing

Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing

This paper studies the AWC (Active Wafer Centering) algorithm for the movement control and wafer calibration of the handling robot in semiconductor manufacturing to prevent wafer surface contact and contamination during the transfer process. The mechanical and software architecture of the wafer-hand...

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Bibliographic Details
Main Authors: Bing-Yuan Han, Bin Zhao, Ruo-Huai Sun
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Sensors
Subjects:
Integrated Circuit (IC)
handling robot
motion control
Active Wafer Centering algorithm
Online Access:https://www.mdpi.com/1424-8220/23/20/8502

Internet

https://www.mdpi.com/1424-8220/23/20/8502

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