Thermal Stability of Self-Assembled 3-Aminopropyltrimethoxysilane Diffusion Barrier Terminated by Carboxyl Groups

Thermal Stability of Self-Assembled 3-Aminopropyltrimethoxysilane Diffusion Barrier Terminated by Carboxyl Groups

The carboxyl-terminated 3-aminopropyltrimethoxysilane (APTMS) self-assembled monolayer (SAM) diffusion barrier was prepared onto a Si substrate via molecular self-assembly and graft modification technology. The SAM was afterward coated with a copper film via radio-frequency (RF) magnetron sputtering...

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Bibliographic Details
Main Authors: Hongjin Liu, Mingkun Fu, Zhe Wang, Shaozhi Pang, Huaiqing Zhu, Chen Zhang, Lijun Ming, Xinyu Liu, Minghui Ding, Yudong Fu
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Applied Sciences
Subjects:
barrier
self-assembled monolayer
copper
carboxyl-terminated SAM
resistance
thermal stability
Online Access:https://www.mdpi.com/2076-3417/12/21/11098

Internet

https://www.mdpi.com/2076-3417/12/21/11098

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