Characterization of Sensitivity of Time Domain MEMS Accelerometer

Characterization of Sensitivity of Time Domain MEMS Accelerometer

This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with mi...

Full description

Bibliographic Details
Main Authors: Enfu Li, Jiaying Jian, Fan Yang, Zhiyong Ma, Yongcun Hao, Honglong Chang
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
MEMS
inertial sensor
accelerometer
time domain measurement
adjustable sensitivity
Online Access:https://www.mdpi.com/2072-666X/15/2/227

Internet

https://www.mdpi.com/2072-666X/15/2/227

Similar Items