Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (ca...

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Bibliographic Details
Main Authors: Marta Maria Kluba, Jian Li, Katja Parkkinen, Marcus Louwerse, Jaap Snijder, Ronald Dekker
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Micromachines
Subjects:
SOI substrate
cavity-SOI
cavity-BOX
patterned BOX
buried hard-etch mask
flex to rigid (F2R)
Online Access:https://www.mdpi.com/2072-666X/12/4/414

Internet

https://www.mdpi.com/2072-666X/12/4/414

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