Numerical investigation of characteristics and excitation effects on discharge properties in an inductively coupled plasma torch
This paper focuses on an atmospheric-pressure inductively coupled plasma (ICP) torch sustained by an argon discharge. A two-dimensional axisymmetric model is developed for the numerical simulation of the device. Maxwell equations and fluid equations were solved as the governing equations using the C...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-04-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0139959 |