Performance improvement of miniaturized ZnO nanowire accelerometer fabricated by refresh hydrothermal synthesis
Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the acc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Royal Society
2017-01-01
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| Series: | Royal Society Open Science |
| Subjects: | |
| Online Access: | https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.170557 |