Optical fiber metrology to small displacements detection
This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 mm in thickness, 5 mm in side length and 300 mm...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universidad de Antioquia
2013-02-01
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| Series: | Revista Facultad de Ingeniería Universidad de Antioquia |
| Subjects: | |
| Online Access: | https://revistas.udea.edu.co/index.php/ingenieria/article/view/14663 |