Optical fiber metrology to small displacements detection
This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 mm in thickness, 5 mm in side length and 300 mm...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Universidad de Antioquia
2013-02-01
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Series: | Revista Facultad de Ingeniería Universidad de Antioquia |
Subjects: | |
Online Access: | https://revistas.udea.edu.co/index.php/ingenieria/article/view/14663 |
Summary: | This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 mm in thickness, 5 mm in side length and 300 mm in bulk, which was glued to a glass slide. Static behavior is defines as the membrane deflection measurement taking into account only its response to the infrared radiation energy that drives them.
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ISSN: | 0120-6230 2422-2844 |