Research Progress of MEMS Inertial Switches

Research Progress of MEMS Inertial Switches

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial...

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Bibliographic Details
Main Authors: Min Liu, Xinyang Wu, Yanxu Niu, Haotian Yang, Yingmin Zhu, Weidong Wang
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
MEMS
inertial switch
threshold acceleration
sensitive direction
contact effect
fabrication
Online Access:https://www.mdpi.com/2072-666X/13/3/359

Internet

https://www.mdpi.com/2072-666X/13/3/359

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