A New Hybrid Stepper Motor, Compliant Piezoelectric Micro-Tweezer for Extended Stroke
The revolutionary economic potential of micro and nanotechnology is already recognized. Micro and nano-scale technologies that use electrical, magnetic, optical, mechanical, and thermal phenomena separately or in combination are either already in the industrial phase or approaching it. The products...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/6/1112 |