Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel

Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel

The direct liquid injection chemical vapor deposition (DLI-CVD) of uniform and dense zirconium oxide (ZrO2) thin films applicable as corrosion protection coatings (CPCs) is reported. We present the entire development chain from the rational choice and thermal evaluation of the suitable heteroleptic...

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Bibliographic Details
Main Authors: Sebastian M.J. Beer, Diane Samelor, Alsayed Abdel Aal, Johannes Etzkorn, Detlef Rogalla, Asiya E. Turgambaeva, Jerome Esvan, Aleksander Kostka, Constantin Vahlas, Anjana Devi
Format: Article
Language:English
Published: Elsevier 2021-07-01
Series:Journal of Materials Research and Technology
Subjects:
Chemical vapor deposition
Zirconium oxide
Corrosion protection
Thin film analysis
Electrochemical impedance spectroscopy
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785421005081

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http://www.sciencedirect.com/science/article/pii/S2238785421005081

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