On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment
This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phen...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-09-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/10/10/256 |