MEMS and NEMS - micro (and nano) electromechanical systems
<p>MEMS and NEMS use and application is growing and their market is expanding. With the development of 5G and IoT technologies the number of MEMS components is always increasing.</p><p>In this paper an introduction to MEMS/NEMS definition, categories, and advantages. Fabrication te...
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| Format: | Article |
| Language: | English |
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Academy Publishing Center
2022-06-01
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| Series: | Advances in Computing and Engineering |
| Subjects: | |
| Online Access: | http://apc.aast.edu/ojs/index.php/ACE/article/view/480 |