Free vibration for a micro resonant pressure sensor with cross-type resonator
In this paper, a cross resonator pressure sensor is proposed to improve the detection accuracy of capacitor-detecting sensor. Considering electrostatic force and molecular force, the multi-field coupled dynamic equation of the sensor is established. By solving the dynamic equation, the equations for...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2021-01-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814020987336 |