Redeposition-Free Deep Etching in Small KY(WO<sub>4</sub>)<sub>2</sub> Samples

Redeposition-Free Deep Etching in Small KY(WO<sub>4</sub>)<sub>2</sub> Samples

KY(WO<sub>4</sub>)<sub>2</sub> is a promising material for on-chip laser sources. Deep etching of small KY(WO<sub>4</sub>)<sub>2</sub> samples in combination with various thin film deposition techniques is desirable for the manufacturing of such device...

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Bibliographic Details
Main Authors: Simen Mikalsen Martinussen, Raimond N. Frentrop, Meindert Dijkstra, Sonia Maria Garcia-Blanco
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Micromachines
Subjects:
KY(WO<sub>4</sub>)<sub>2</sub>
KYW
tungstate
etching
integrated optics
fabrication
Online Access:https://www.mdpi.com/2072-666X/11/12/1033

Internet

https://www.mdpi.com/2072-666X/11/12/1033

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