Lateral Electrochemical Metallization Cells for Reconfigurable Interconnect Systems

Lateral Electrochemical Metallization Cells for Reconfigurable Interconnect Systems

Lateral electrochemical metallization (ECM) cells are fabricated with a combined spacer/damascene process. The process allows the realization of nanoscale geometrical distances between the two electrodes independent of lithography. Such lateral ECM cells are an essential part in a reconfigurable int...

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Bibliographic Details
Main Authors: T. Frahm, M. Buttberg, G. Gvozdev, R. A. Muller, S. Chen, B. Sun, L. Raffauf, S. Menzel, I. Valov, D. Wouters, R. Waser, J. Knoch
Format: Article
Language:English
Published: IEEE 2023-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Electrochemical metallization (ECM)
lift-off
memristor
neuromorphic hardware
RRAM
ReRAM
Online Access:https://ieeexplore.ieee.org/document/10190058/

Internet

https://ieeexplore.ieee.org/document/10190058/

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