Limits of carrier mobility in Sb-doped SnO2 conducting films deposited by reactive sputtering
Electron transport in Sb-doped SnO2 (ATO) films is studied to unveil the limited carrier mobility observed in sputtered films as compared to other deposition methods. Transparent and conductive ATO layers are deposited from metallic tin targets alloyed with antimony in oxygen atmosphere optimized fo...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2015-06-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4916586 |