Small Feature‐Size Transistors Based on Low‐Dimensional Materials: From Structure Design to Nanofabrication Techniques

Small Feature‐Size Transistors Based on Low‐Dimensional Materials: From Structure Design to Nanofabrication Techniques

Abstract For several decades after Moore's Law is proposed, there is a continuous effort to reduce the feature‐size of transistors. However, as the size of transistors continues to decrease, numerous challenges and obstacles including severe short channel effects (SCEs) are emerging. Recently,...

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Bibliographic Details
Main Authors: Xiaqing Fu, Zhifang Liu, Huaipeng Wang, Dan Xie, Yilin Sun
Format: Article
Language:English
Published: Wiley 2024-09-01
Series:Advanced Science
Subjects:
nanofabrication
nano‐gate transistors
small feature‐size transistors
vertical transistors
Online Access:https://doi.org/10.1002/advs.202400500

Internet

https://doi.org/10.1002/advs.202400500

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