Efficient single-etch surface grating couplers in silicon nitride platforms for telecom and datacom wavebands
We present designs and experiments of single-etched amorphous silicon (α-Si) surface grating couplers on a silicon nitride (SiN) waveguide, operating at the telecom (C-band) and datacom (O-band) wavebands. SiN-only grating couplers demonstrate experimental coupling loss of -3.9 dB at 1.55 μm wavelen...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2023-01-01
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Series: | EPJ Web of Conferences |
Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_01003.pdf |