Optical properties and growth mechanism of rock-like structured black silicon
In this study, rock-like black silicon is prepared by using plasma enhanced hot-wire chemical vapor deposition (PE-HWCVD). The average grain sizes of polysilicon for 10-min, 20-min and 40-min growth time was about 12.4, 14.3 and 15.5 nm, respectively. As the growth time increased, the surface morpho...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/aba309 |