STRUCTURE CHANGING OF SUBMICRON PZT FILMS WITH A FINE VARIATION OF THE COMPOSITION CORRESPONDING TO MORPHOTROPIC PHASE BOUNDARY
The paper discusses the possibility of a fine variation in the composition of submicron ferroelectric films of lead zirconate titanate solid solutions corresponding to a morphotropic phase boundary. Composition was varied by changing the distance from the target to the substrate in the range of 30-7...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Tver State University
2021-12-01
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| Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| Subjects: | |
| Online Access: | https://physchemaspects.ru/2021/doi-10-26456-pcascnn-2021-13-400/?lang=en |