A computational framework for guiding the MOCVD-growth of wafer-scale 2D materials
Abstract Reproducible wafer-scale growth of two-dimensional (2D) materials using the Chemical Vapor Deposition (CVD) process with precise control over their properties is challenging due to a lack of understanding of the growth mechanisms spanning over several length scales and sensitivity of the sy...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2022-11-01
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Series: | npj Computational Materials |
Online Access: | https://doi.org/10.1038/s41524-022-00936-y |