Conceptual design of a Langmüir probe for cold plasma characterization employing statistical design of experiments
The characterization and control of plasma-assisted processes, has become increasingly urgent to adapt this kind technology to industrial contexts. This work presents the design and construction of a cold plasma characterization system by electrostatic means (Langmuir probe), based on concepts of p...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Universidad de Antioquia
2013-08-01
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Series: | Revista Facultad de Ingeniería Universidad de Antioquia |
Subjects: | |
Online Access: | https://revistas.udea.edu.co/index.php/ingenieria/article/view/16312 |