Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon
The machinability of brittle materials is strongly dependent on machining conditions. In the present work, we perform ultra-precision single point diamond turning experiments of monocrystalline Si(100) using diamond cutting tools. The machined surface quality is characterized by evaluating surface t...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
AIMS Press
2019-07-01
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Series: | AIMS Materials Science |
Subjects: | |
Online Access: | https://www.aimspress.com/article/10.3934/matersci.2019.5.635/fulltext.html |