Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon

The machinability of brittle materials is strongly dependent on machining conditions. In the present work, we perform ultra-precision single point diamond turning experiments of monocrystalline Si(100) using diamond cutting tools. The machined surface quality is characterized by evaluating surface t...

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Bibliographic Details
Main Authors: Lu Liao, Guo Li, Junjie Zhang
Format: Article
Language:English
Published: AIMS Press 2019-07-01
Series:AIMS Materials Science
Subjects:
Online Access:https://www.aimspress.com/article/10.3934/matersci.2019.5.635/fulltext.html