Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon
The machinability of brittle materials is strongly dependent on machining conditions. In the present work, we perform ultra-precision single point diamond turning experiments of monocrystalline Si(100) using diamond cutting tools. The machined surface quality is characterized by evaluating surface t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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AIMS Press
2019-07-01
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| Series: | AIMS Materials Science |
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| Online Access: | https://www.aimspress.com/article/10.3934/matersci.2019.5.635/fulltext.html |
| _version_ | 1831526064938024960 |
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| author | Lu Liao Guo Li Junjie Zhang |
| author_facet | Lu Liao Guo Li Junjie Zhang |
| author_sort | Lu Liao |
| collection | DOAJ |
| description | The machinability of brittle materials is strongly dependent on machining conditions. In the present work, we perform ultra-precision single point diamond turning experiments of monocrystalline Si(100) using diamond cutting tools. The machined surface quality is characterized by evaluating surface topography and surface integrity. Systematic investigation of cutting parameters dependence of machining results is performed by considering rake angle of cutting tool, depth of cut and spindle speed. Experimental results suggest an optimized combination of cutting parameters for the best surface quality of Si(100) by diamond turning. |
| first_indexed | 2024-12-16T16:02:41Z |
| format | Article |
| id | doaj.art-f707e796059a4d8d8843e4425dfbeced |
| institution | Directory Open Access Journal |
| issn | 2372-0468 2372-0484 |
| language | English |
| last_indexed | 2024-12-16T16:02:41Z |
| publishDate | 2019-07-01 |
| publisher | AIMS Press |
| record_format | Article |
| series | AIMS Materials Science |
| spelling | doaj.art-f707e796059a4d8d8843e4425dfbeced2022-12-21T22:25:26ZengAIMS PressAIMS Materials Science2372-04682372-04842019-07-016563564510.3934/matersci.2019.5.635Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline siliconLu Liao0Guo Li1Junjie Zhang21 Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China1 Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China2 Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, ChinaThe machinability of brittle materials is strongly dependent on machining conditions. In the present work, we perform ultra-precision single point diamond turning experiments of monocrystalline Si(100) using diamond cutting tools. The machined surface quality is characterized by evaluating surface topography and surface integrity. Systematic investigation of cutting parameters dependence of machining results is performed by considering rake angle of cutting tool, depth of cut and spindle speed. Experimental results suggest an optimized combination of cutting parameters for the best surface quality of Si(100) by diamond turning.https://www.aimspress.com/article/10.3934/matersci.2019.5.635/fulltext.htmlmonocrystalline silicondiamond turningsurface integrityrake angle |
| spellingShingle | Lu Liao Guo Li Junjie Zhang Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon AIMS Materials Science monocrystalline silicon diamond turning surface integrity rake angle |
| title | Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| title_full | Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| title_fullStr | Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| title_full_unstemmed | Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| title_short | Experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| title_sort | experimental investigation of cutting parameters dependence in diamond turning of monocrystalline silicon |
| topic | monocrystalline silicon diamond turning surface integrity rake angle |
| url | https://www.aimspress.com/article/10.3934/matersci.2019.5.635/fulltext.html |
| work_keys_str_mv | AT luliao experimentalinvestigationofcuttingparametersdependenceindiamondturningofmonocrystallinesilicon AT guoli experimentalinvestigationofcuttingparametersdependenceindiamondturningofmonocrystallinesilicon AT junjiezhang experimentalinvestigationofcuttingparametersdependenceindiamondturningofmonocrystallinesilicon |