Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform
This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound pa...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-08-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/9/3/65 |