Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Abstract The cleaning of two-dimensional (2D) materials is an essential step in the fabrication of future devices, leveraging their unique physical, optical, and chemical properties. Part of these emerging 2D materials are transition metal dichalcogenides (TMDs). So far there is limited understandin...

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Bibliographic Details
Main Authors: Daniil Marinov, Jean-François de Marneffe, Quentin Smets, Goutham Arutchelvan, Kristof M. Bal, Ekaterina Voronina, Tatyana Rakhimova, Yuri Mankelevich, Salim El Kazzi, Ankit Nalin Mehta, Pieter-Jan Wyndaele, Markus Hartmut Heyne, Jianran Zhang, Patrick C. With, Sreetama Banerjee, Erik C. Neyts, Inge Asselberghs, Dennis Lin, Stefan De Gendt
Format: Article
Language:English
Published: Nature Portfolio 2021-01-01
Series:npj 2D Materials and Applications
Online Access:https://doi.org/10.1038/s41699-020-00197-7

Internet

https://doi.org/10.1038/s41699-020-00197-7

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