Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures

Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures

Most 2D materials are unstable under ambient conditions. Assembly of van der Waals heterostructures in the inert atmosphere of the glove box with ex situ lithography partially solves the problem of device fabrication out of unstable materials. In our paper, we demonstrate an approach to the next-gen...

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Bibliographic Details
Main Authors: Aliaksandr Duleba, Mikhail Pugachev, Mark Blumenau, Sergey Martanov, Mark Naumov, Aleksey Shupletsov, Aleksandr Kuntsevich
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Micromachines
Subjects:
van der Waals heterostructures
2D materials
lithography
nanofabrication
metal films
Online Access:https://www.mdpi.com/2072-666X/15/1/94

Internet

https://www.mdpi.com/2072-666X/15/1/94

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