Grinding techniques for fabricating micro-lens array mold made of cemented carbide (Polycrystalline diamond tools and mold surface roughness)

A grinding technique was developed to fabricate a micro-lens array (MLA) mold made of cemented carbide with a diameter of 30 μm, a pitch of 35 μm, a diameter expansion rate of 0%, a surface roughness of less than 10 nmRz and 1027 lenses. Grinding tools made of polycrystalline diamond (PCD) and nano-...

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Bibliographic Details
Main Authors: Takuya SEMBA, Yoshifumi AMAMOTO, Hitoshi SUMIYA
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2021-09-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/transjsme/87/901/87_21-00216/_pdf/-char/en